Optix

Gencoa Optix is a multi-purpose instrument for analyzing process gases and vacuum quality/contamination. Optix functions through an operating pressure range of 10-7 mbar up to 10 mbar without a requirement for differential pumping. Its unique optical spectrum-based sensing and remote plasma generation method allows any type of vacuum process to be characterized, including ALD and CVD, whilst the robust nature of the device eliminates risk of damage, and requires little maintenance. The accompanying software features a built-in spectral database and powerful tools for recording, data referencing, and automatic gas species identification.